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C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) StdTpc-Equipment Process Control When the liquid phase is

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Description

When the liquid phase is exhausted

The trimming width

このテストの一部分として,標準水分の検定に使用するのに適切であると思われる,ある水分分析器を検定するための手順を述べる。他の応用に計画された水分分析器は,異なった基準を満足するために必要となる場合がある。

A gas conforming to the specifications will commonly contain more of the major component than the minimum permissible limit or contain less of an impurity (or several impurities) than the SEMI C3 maximum permissible limit

to be consistent with contemporary manufacturing processes for that gas

C00343 - SEMI C3.43 - Standard for Hydrogen Fluoride (HF), Anhydrous (Provisional) StdTpc-Equipment Process Control When the liquid phase isThis Standard was technically approved by the Gases Global Technical Committee. Available at www. semi. org in July 2001; originally published in 1990. NOTICE: This Document was balloted and approved for withdrawal in 2001. Hydrogen fluoride is a highly toxic, irritating and corrosive gas with a sharp, pungent odor. It is colorless and nonflammable, but reacts violently with most organic materials. Referenced SEMI Standards None.

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